Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldridge.

• Material Type: 図書
• ISBN: 0824787838 (alk. paper)
• Title: Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldridge.
• Author Heading: 西, 義雄, 材料工学 ニシ, ヨシオ, ザイリョウ コウガク ( 00669484 )Authorities; Doering, Robert, 1946-
• Publication, Distribution, etc.: New York : Marcel Dekker
• Publication Date: c2000.
• Publication Date (W3CDTF): 2000
• Extent: xiv, 1157 p. : ill. ; 29 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductors -- Design and construction -- Handbooks, manuals, etc.; Semiconductor industry -- Handbooks, manuals, etc.
• LCC: TK7871.85
• DDC: 621.3815/2
• NDLC: ND371
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-A30
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003700678; http://id.ndl.go.jp/bib/000003700678
• Bibliographic Record Category (NDL): 211