図書

プラズマ/プロセスの原理

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プラズマ/プロセスの原理

Call No. (NDL)
MC241-H2
Bibliographic ID of National Diet Library
000003990801
Material type
図書
Author
Michael A.Lieberman, Allan J.Lichtenberg 著ほか
Publisher
EDリサーチ社
Publication date
2001.11
Material Format
Paper
Capacity, size, etc.
21, 430p ; 26cm
NDC
427.6
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Notes on use

Note (General):

原タイトル: Principles of plasma discharges and materials processing

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Paper

Material Type
図書
Title Transcription
プラズマ プロセス ノ ゲンリ
Author/Editor
Michael A.Lieberman, Allan J.Lichtenberg 著
堀勝 監修
佐藤久明 訳
Publication, Distribution, etc.
Publication Date
2001.11
Publication Date (W3CDTF)
2001
Extent
21, 430p
Size
26cm