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図書

Silicon materials -- processing, characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. : 2002 MRS spring meeting : Apr 2002, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 716)

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Silicon materials -- processing, characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. : 2002 MRS spring meeting : Apr 2002, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 716)

Call No. (NDL)
M17-03-715
Bibliographic ID of National Diet Library
000004061143
Material type
図書
Author
Materials Research Society.ほか
Publisher
Materials Research Society
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
xvii, 672 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
1558996524
Publication, Distribution, etc.
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
xvii, 672 p. : ill. ; 24 cm.