半導体製造装置の信頼度向上 : 信頼度の基本と向上への具体的な取り組み (21世紀のテクノロジ・シリーズ)

半導体製造装置の信頼度向上 : 信頼度の基本と向上への具体的な取り組み

(21世紀のテクノロジ・シリーズ)

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Material Type: 図書
ISBN: 4-901790-08-0
Title: 半導体製造装置の信頼度向上 : 信頼度の基本と向上への具体的な取り組み
Title Transcription: ハンドウタイセイゾウソウチノシンライドコウジョウ : シンライドノキホントコウジョウエノグタイテキナトリクミ
Author/Editor: 坂本雄三郎, Vallabh H.Dhudshia 共著
Series Title: 21世紀のテクノロジ・シリーズ
Author Heading: 坂本, 雄三郎, 1936- サカモト, ユウザブロウ, 1936- ( 00194745 )Authorities
Dhudishia, Vallabh H ( 00909179 )Authorities
Publication, Distribution, etc.: 東京 : EDリサーチ社
Publication Date: 2002.7
Publication Date (W3CDTF): 2002
Extent: 174p
Size: 21cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体製造装置ハンドウタイセイゾウソウチ ( 001237257 )Authorities
NDC 9th ed.: 549.8 : Electronic engineering
NDLC: ND371
Target Audience: 一般
Price: 3800円
Holding library: 国立国会図書館
Call No.: ND371-H22
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004065954
http://id.ndl.go.jp/bib/000004065954
National Bibliography No. (JPNO): 20409790
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111