図書

Semiconductor manufacturing science workshop : SEMICON Southwest : October 17-18, 2000, Austin Convention Center, Austin, Taxas, USA. : Oct 2000, Austin, TX.

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Semiconductor manufacturing science workshop : SEMICON Southwest : October 17-18, 2000, Austin Convention Center, Austin, Taxas, USA. : Oct 2000, Austin, TX.

Call No. (NDL)
M17-03-1163
Bibliographic ID of National Diet Library
000004082467
Material type
図書
Author
Semiconductor Equipment and Materials International.
Publisher
SEMI
Publication date
c2000.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Presentations.

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Paper

Material Type
図書
Title
Semiconductor manufacturing science workshop : SEMICON Southwest : October 17-18, 2000, Austin Convention Center, Austin, Taxas, USA. : Oct 2000, Austin, TX.
Author Heading
Semiconductor Equipment and Materials International.
Publication, Distribution, etc.
SEMI
Publication Date
c2000.
Publication Date (W3CDTF)
2000
Extent
v.
Alternative Title
SEMICON, Southwest 2000 : Semiconductor manufacturing science workshop -- implementing the ITRS factory integration roadmap
NDLC
M17
Note (General)
Presentations.