図書

Improving environmental performance of wafer manufacturing processes in cooperation with Semiconductor Industry Association (SIA): July 10, 2000, San Francisco Hilton and Towers, San Francisco, California. : Jul 2000, San Francisco, CA.

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Improving environmental performance of wafer manufacturing processes in cooperation with Semiconductor Industry Association (SIA): July 10, 2000, San Francisco Hilton and Towers, San Francisco, California. : Jul 2000, San Francisco, CA.

Call No. (NDL)
M17-03-1158
Bibliographic ID of National Diet Library
000004082894
Material type
図書
Author
Semiconductor Equipment and Materials International.ほか
Publisher
Semiconductor Equipment and Materials International
Publication date
c2000.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Paper

Material Type
図書
ISBN
1892568535
Publication Date
c2000.
Publication Date (W3CDTF)
2000
Extent
v.
Alternative Title
semi : improving environmental performance of wafer manufacturing processes : SEMICON West 2000 : technical programs for the semiconductor and flat panel display equipment and materials industries
NDLC