Semiconductor wafer bonding: science, technology, and applications 6 : proceedings of the international symposium. : 6th international symposium on semiconductor Wafer bonding: science, technology and applications : Sep 2001, San Francisco, CA. (PV ; 01-27)

Semiconductor wafer bonding: science, technology, and applications 6 : proceedings of the international symposium. : 6th international symposium on semiconductor Wafer bonding: science, technology and applications : Sep 2001, San Francisco, CA.

(PV ; 01-27)

Call No. (NDL): M17-03-1042
Bibliographic ID of National Diet Library: 000004097763

Material type: 図書

Author: Baumgart, H.ほか

Publisher: Electrochemical Society

Publication date: c2002.

Material Format: Paper

Capacity, size, etc.: viii, 294 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Papers."The Sixth International Symposium on Wafer Bonding: Science, Technology and Applications was held in September 2001 in San Francisco as part o...

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Paper

Material Type: 図書
ISBN: 1566773601
Title: Semiconductor wafer bonding: science, technology, and applications 6 : proceedings of the international symposium. : 6th international symposium on semiconductor Wafer bonding: science, technology and applications : Sep 2001, San Francisco, CA.
Series Title: PV ; 01-27
Title Heading: Proceedings (Electrochemical Society) ; v. 2001-27.
Author Heading: Baumgart, H.
International Symposium on Semiconductor Wafer Bonding (6th : 2001 : San Francisco, Calif.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2002.
Publication Date (W3CDTF): 2002
Extent: viii, 294 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Bonding -- Congresses.
Semiconductor wafers -- Congresses.
Microelectromechanical systems -- Design and construction -- Congresses.
LCC: TK7871.85
NDLC: M17
Note (General): Papers.
"The Sixth International Symposium on Wafer Bonding: Science, Technology and Applications was held in September 2001 in San Francisco as part of the 2001 Fall Meeting of the Electrochemical Society. " -- Preface.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-1042
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004097763
http://id.ndl.go.jp/bib/000004097763
RLIN No.: CSUGA5414779-B
Bibliographic Record Category (NDL): 215