Rapid thermal and other short-time processing technologies 3 : proceedings of the international symposium. : May 2002, Philadelphia, PA. (PV ; 02-11)

Rapid thermal and other short-time processing technologies 3 : proceedings of the international symposium. : May 2002, Philadelphia, PA.

(PV ; 02-11)

Call No. (NDL): M17-03-1041
Bibliographic ID of National Diet Library: 000004097830

Material type: 図書

Author: Timans, P. J. (Paul J.)ほか

Publisher: Electrochemical Society

Publication date: c2002.

Material Format: Paper

Capacity, size, etc.: xiii, 478 p. : ill. ; 24 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers."The international symposium on Rapid Thermal and Other Short-Time Processing Technologies III was held from May 13 through May 16, 2002 in Phi...

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN: 1566773342
Title: Rapid thermal and other short-time processing technologies 3 : proceedings of the international symposium. : May 2002, Philadelphia, PA.
Series Title: PV ; 02-11
Title Heading: Proceedings (Electrochemical Society) ; v. 2002-11.
Author Heading: Timans, P. J. (Paul J.)
International Symposium on Rapid Thermal and Other Short-Time Processing Technologies (3rd : 2002 Philadelphia, Pa.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2002.
Publication Date (W3CDTF): 2002
Extent: xiii, 478 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Design and construction -- Congresses.
Manufacturing processes -- Congresses.
NDLC: M17
Note (General): Papers.
"The international symposium on Rapid Thermal and Other Short-Time Processing Technologies III was held from May 13 through May 16, 2002 in Philadelphia, Pennsylvania as part of the Centennial (201st) Meeting of the Electrochemical Society" -- Pref.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-1041
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004097830
http://id.ndl.go.jp/bib/000004097830
RLIN No.: CUBGGLAD184955947-B
Bibliographic Record Category (NDL): 215