図書

High purity silicon 7 : proceedings of the international symposium. : 7th symposium on high purity silicon : Oct 2002, Salt Lake City, UT. (PV ; 02-20)

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High purity silicon 7 : proceedings of the international symposium. : 7th symposium on high purity silicon : Oct 2002, Salt Lake City, UT.

(PV ; 02-20)

Call No. (NDL)
M17-03-1481
Bibliographic ID of National Diet Library
000004111980
Material type
図書
Author
Claeys, Cor L.ほか
Publisher
Electrochemical Society
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
xiii, 406 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
156677344X
Series Title
Publication, Distribution, etc.
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
xiii, 406 p. : ill. ; 24 cm.