Development of subpicosecond pulse radiolysis system and its application to investigation of radiation-induced reactions in chemically amplified resists

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Material Type: 博士論文
Title: Development of subpicosecond pulse radiolysis system and its application to investigation of radiation-induced reactions in chemically amplified resists
Author/Editor: Takahiro Kozawa [著]
Author Heading: 古澤, 孝弘コザワ, タカヒロ
Publication, Distribution, etc.: [Takahiro Kozawa]
Publication Date: [2003]
Publication Date (W3CDTF): 2003
Extent: 1冊
Alternative Title: サブピコ秒パルスラジオリシス装置の開発と化学増幅型レジスト中に誘起される放射線化学反応研究への応用サブピコビョウパルスラジオリシスソウチノカイハツトカガクゾウフクガタレジストチュウニユウキサレルホウシャセンカガクハンノウケンキュウエノオウヨウ
Degree grantor/type: 大阪大学
Date Granted: 平成15年1月24日
Date Granted (W3CDTF): 2003
Dissertation Number: 乙第8585号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2003-E799
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004139515
http://id.ndl.go.jp/bib/000004139515
Bibliographic Record Category (NDL): 213