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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ヒカリ リソグラフィ ニ オケル カコウ スンポウ ノ コウセイドカ ニ カンスル ケンキュウ
- Author/Editor
- 吉野宏 [著]
- Author Heading
- 吉野, 宏 ヨシノ, ヒロシ
- Publication, Distribution, etc.
- Publication Date
- 2002
- Publication Date (W3CDTF)
- 2002
- Extent
- 1冊
- Degree grantor/type
- 大阪大学