図書

MEMS 2003 : MEMS-03 Kyoto : IEEE the sixteenth annual international conference on micro electro mechanical systems : proceedings : Kyoto, Japan : January 19-23, 2003. : Jan 2003, Kyoto, Japan.

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MEMS 2003 : MEMS-03 Kyoto : IEEE the sixteenth annual international conference on micro electro mechanical systems : proceedings : Kyoto, Japan : January 19-23, 2003. : Jan 2003, Kyoto, Japan.

Call No. (NDL)
M17-04-203
Bibliographic ID of National Diet Library
000004190450
Material type
図書
Author
IEEE International Conference on Micro Electro Mechanical Systems (16th : 2003 : Kyoto, Japan)
Publisher
IEEE
Publication date
c2003.
Material Format
Paper
Capacity, size, etc.
xxxiv, 711 p. : ill. ; 30 cm.
NDC
-
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Program and papers.Related URL: http: //ieeexplore.ieee.org/servlet/opac?punumber=8460.IEEE cat no 03CH37426.

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Paper

Material Type
図書
ISBN
0780377443
ISSN
1084-6999
Publication, Distribution, etc.
Publication Date
c2003.
Publication Date (W3CDTF)
2003
Extent
xxxiv, 711 p. : ill. ; 30 cm.
Alternative Title
MEMS 2003 : MEMS-03 Kyoto : IEEE the 16th annual international conference on micro electro mechanical systems : proceedings : Kyoto, Japan : January 19-23, 2003