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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0780377443
- ISSN
- 1084-6999
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2003.
- Publication Date (W3CDTF)
- 2003
- Extent
- xxxiv, 711 p. : ill. ; 30 cm.
- Alternative Title
- MEMS 2003 : MEMS-03 Kyoto : IEEE the 16th annual international conference on micro electro mechanical systems : proceedings : Kyoto, Japan : January 19-23, 2003