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博士論文

Deep level characterization and electrochemical processing for single crystalline silicon carbide

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Deep level characterization and electrochemical processing for single crystalline silicon carbide

Call No. (NDL)
UT51-2003-H158
Bibliographic ID of National Diet Library
000004195334
Material type
博士論文
Author
Masashi Kato [著]
Publisher
[Masashi Kato]
Publication date
2002
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋工業大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Masashi Kato [著]
Author Heading
加藤, 正史 カトウ, マサシ
Publication, Distribution, etc.
Publication Date
2002
Publication Date (W3CDTF)
2002
Extent
1冊
Alternative Title
単結晶SiCの深い準位の評価と電気化学的手法による加工 タンケッショウ SiC ノ フカイ ジュンイ ノ ヒョウカ ト デンキ カガクテキ シュホウ ニ ヨル カコウ
Degree grantor/type
名古屋工業大学