Optical metrology roadmap for the semiconductor, optical, and data storage industries 2 : 2-3 August 2001 : San Diego, USA. : 46th annual SPIE international symposium on optical science and technology : Aug 2001, San Diego, CA. (SPIE Proceedings ; 4449)

Optical metrology roadmap for the semiconductor, optical, and data storage industries 2 : 2-3 August 2001 : San Diego, USA. : 46th annual SPIE international symposium on optical science and technology : Aug 2001, San Diego, CA.

(SPIE Proceedings ; 4449)

Call No. (NDL): M17-03-3089
Bibliographic ID of National Diet Library: 000004200110

Material type: 図書

Author: Duparré, Angela.ほか

Publisher: SPIE

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: ix, 294 p. : ill. ; 28 cm.

NDC: -

Notes on use

Note (General)：: Papers.

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN: 0819441635
ISSN (series): 0277-786X
Title: Optical metrology roadmap for the semiconductor, optical, and data storage industries 2 : 2-3 August 2001 : San Diego, USA. : 46th annual SPIE international symposium on optical science and technology : Aug 2001, San Diego, CA.
Series Title: SPIE Proceedings ; 4449
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4449.
Author Heading: Duparré, Angela.
Singh, Bhanwar.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: ix, 294 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Optical measurements -- Industrial applications -- Congresses.
Surfaces (Technology) -- Measurement -- Congresses.
Optoelectronic devices -- Industrial applications -- Congresses.
Information retrieval -- Technological innovations -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-03-3089
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004200110
http://id.ndl.go.jp/bib/000004200110
RLIN No.: NYCGAUK2845-B
Bibliographic Record Category (NDL): 215