図書

Design, characterization, and packaging for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 symposium on microelectronics and MEMS : Dec 2001, Adelaide, Australia. (SPIE Proceedings ; 4593)

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Design, characterization, and packaging for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 symposium on microelectronics and MEMS : Dec 2001, Adelaide, Australia.

(SPIE Proceedings ; 4593)

Call No. (NDL)
M17-03-3049
Bibliographic ID of National Diet Library
000004200614
Material type
図書
Author
Institute of Electrical and Electronics Engineers. South Australia Section.ほか
Publisher
SPIE
Publication date
c2001.
Material Format
Paper
Capacity, size, etc.
ix, 322 p. : ill. ; 28 cm.
NDC
-
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Papers.

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Errata sheet has tipped in.

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Paper

Material Type
図書
ISBN
0819443239
ISSN (series)
0277-786X
Title
Design, characterization, and packaging for MEMS and microelectronics 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 symposium on microelectronics and MEMS : Dec 2001, Adelaide, Australia.
Series Title
SPIE Proceedings ; 4593
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4593.
Author Heading
Institute of Electrical and Electronics Engineers. South Australia Section.
Franzon, Paul D.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2001.
Publication Date (W3CDTF)
2001