Cleaning technology in semiconductor device manufacturing : proceedings of the seventh international symposium. : Fall meeting of the Electrochemical Society : Sep 2001, San Francisco, CA. (PV ; 2001-26)

Cleaning technology in semiconductor device manufacturing : proceedings of the seventh international symposium. : Fall meeting of the Electrochemical Society : Sep 2001, San Francisco, CA.

(PV ; 2001-26)

Call No. (NDL): M17-03-3494
Bibliographic ID of National Diet Library: 000004202126

Material type: 図書

Author: Rużyłło, Jerzy.ほか

Publisher: Electrochemical Society

Publication date: c2002.

Material Format: Paper

Capacity, size, etc.: x, 374 p. : ill. ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 1566773598
Title: Cleaning technology in semiconductor device manufacturing : proceedings of the seventh international symposium. : Fall meeting of the Electrochemical Society : Sep 2001, San Francisco, CA.
Series Title: PV ; 2001-26
Title Heading: Proceedings (Electrochemical Society) v. 2001-26.
Author Heading: Rużyłło, Jerzy.
International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (7th : 2001 : San Francisco, Calif.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2002.
Publication Date (W3CDTF): 2002
Extent: x, 374 p. : ill. ; 24 cm.
Alternative Title: Cleaning technology in semiconductor device manufacturing : proceedings of the 7th international symposium
Cleaning technology in semiconductor device manufacturing 7
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductor wafers -- Cleaning -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-3494
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004202126
http://id.ndl.go.jp/bib/000004202126
RLIN No.: MOHG50027878-B
Bibliographic Record Category (NDL): 215