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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- 0.1マイクロm GHz セダイ ノ チョウLSI ノ ハイセン ギジュツ ニ カンスル ケンキュウ
- Author/Editor
- 古谷晃 [著]
- Author Heading
- 古谷, 晃 フルヤ, アキラ
- Publication, Distribution, etc.
- Publication Date
- 2002
- Publication Date (W3CDTF)
- 2002
- Extent
- 1冊
- Alternative Title
- Study on metallization technology for future ULSI devices of 0.1μm・GHz generation