図書

Twenty seventh annual IEEE/CPMT/SEMI international electronics manufacturing technology symposium : July 17-18, 2002 the Fairmont Hotel San Jose, CA USA. : Jul 2002, San Jose, CA.

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Twenty seventh annual IEEE/CPMT/SEMI international electronics manufacturing technology symposium : July 17-18, 2002 the Fairmont Hotel San Jose, CA USA. : Jul 2002, San Jose, CA.

Call No. (NDL)
M17-03-3621
Bibliographic ID of National Diet Library
000004206591
Material type
図書
Author
IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium (27th : 2002 : San Jose, California)
Publisher
IEEE
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
iv, 429 p. : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General):

Papers.This symposium is held in conjunction with the SEMICON West 2002 SEMI technology symposium (STS)IEEE cat no 02CH37299.

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Paper

Material Type
図書
ISBN
0780373014 (softbound edition)
0780373022 (microfiche edition)
ISSN
1089-8190
Publication, Distribution, etc.
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
iv, 429 p. : ill. ; 28 cm.
Alternative Title
27th annual IEEE/CPMT/SEMI international electronics manufacturing technology symposium : July 17-18, 2002 the Fairmont Hotel San Jose, CA USA
27th annual IEEE/SEMI : international electronics manufacturing technology (IEMT) symposium : IEMT 2002