図書

Materials science of microelectromechanical systems (MEMS) devices 4 : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. : 4th MRS MEMS symposium, "materials science of microelectromechanical systems (MEMS) devices 4" held at the 2001 MRS fall meeting : Nov 2001, Boston, MA. (Materials Research Society Symposia Proceedings ; 687)

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Materials science of microelectromechanical systems (MEMS) devices 4 : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. : 4th MRS MEMS symposium, "materials science of microelectromechanical systems (MEMS) devices 4" held at the 2001 MRS fall meeting : Nov 2001, Boston, MA.

(Materials Research Society Symposia Proceedings ; 687)

Call No. (NDL)
M17-03-3783
Bibliographic ID of National Diet Library
000004215162
Material type
図書
Author
Ayon, Arturo A.
Publisher
Materials Research Society
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
xi, 318 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
1558996230
Title
Materials science of microelectromechanical systems (MEMS) devices 4 : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. : 4th MRS MEMS symposium, "materials science of microelectromechanical systems (MEMS) devices 4" held at the 2001 MRS fall meeting : Nov 2001, Boston, MA.
Series Title
Materials Research Society Symposia Proceedings ; 687
Title Heading
Materials Research Society symposia proceedings ; v. 687.
Author Heading
Ayon, Arturo A.
Publication, Distribution, etc.
Warrendale : Materials Research Society
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
xi, 318 p. : ill. ; 24 cm.