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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 博士論文
- Author/Editor
- 田中徹 [著]
- Author Heading
- 田中, 徹 タナカ, テツ
- Publication, Distribution, etc.
- Publication Date
- [2003]
- Publication Date (W3CDTF)
- 2003
- Extent
- 1冊
- Alternative Title
- 高性能微細MOSFET技術に関する研究 コウセイノウ ビサイ MOSFET ギジュツ ニ カンスル ケンキュウ
- Degree grantor/type
- 東北大学