18th European conference on mask technology for integrated circuits and microcomponents : proceedings : 15-16 January 2002 : Munich, Germany. : 18th European mask conference (EMC) : Jan 2002, Munich, Germany. (SPIE Proceedings ; 4764)

18th European conference on mask technology for integrated circuits and microcomponents : proceedings : 15-16 January 2002 : Munich, Germany. : 18th European mask conference (EMC) : Jan 2002, Munich, Germany.

(SPIE Proceedings ; 4764)

Call No. (NDL): M17-03-4558
Bibliographic ID of National Diet Library: 000004234249

Material type: 図書

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Publisher: SPIE

Publication date: c2002.

Material Format: Paper

Capacity, size, etc.: xiii, 256 p. : ill. ; 28 cm.

NDC: -

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Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 0819445312
ISSN (series): 0277-786X
Title: 18th European conference on mask technology for integrated circuits and microcomponents : proceedings : 15-16 January 2002 : Munich, Germany. : 18th European mask conference (EMC) : Jan 2002, Munich, Germany.
Series Title: SPIE Proceedings ; 4764
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering. v. 4764.
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Behringer, Uwe F. W.
Forschungszentrum Karlsruhe. Institute for Microstructure Technology.
European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th : 2002 : Munich, Germany)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2002.
Publication Date (W3CDTF): 2002
Extent: xiii, 256 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-03-4558
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004234249
http://id.ndl.go.jp/bib/000004234249
RLIN No.: MOHG50685249-B
Bibliographic Record Category (NDL): 215