Process and equipment control in microelectronic manufacturing 2 : 30-31 May 2001 Edinburgh, UK. : May 2001, Edinburgh, UK.

• Material Type: 図書
• ISBN: 0819441066
• ISSN (series): 0277-786X
• Title: Process and equipment control in microelectronic manufacturing 2 : 30-31 May 2001 Edinburgh, UK. : May 2001, Edinburgh, UK.
• Series Title: SPIE Proceedings ; 4405
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4405.
• Author Heading: European Optical Society (EOS); Fallon, Martin.; Institution of Electrical Engineers, UK.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2001.
• Publication Date (W3CDTF): 2001
• Extent: v, 158 p. : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microelectronics industry -- Production control -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Microelectronics -- Materials -- Congresses.
• LCC: TK7836
• DDC: 621.381
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographic references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-03-2885
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004237861; http://id.ndl.go.jp/bib/000004237861
• LC Control Number: 2002510017; https://lccn.loc.gov/2002510017
• RLIN No.: DCLC2002510017-B
• Bibliographic Record Category (NDL): 215