図書

Radio frequency power in plasmas : 14th topical conference : Oxnard, California 7-9 May 2001. : May 2001, Oxnard, CA. (AIP Conference Proceedings ; 595)

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Radio frequency power in plasmas : 14th topical conference : Oxnard, California 7-9 May 2001. : May 2001, Oxnard, CA.

(AIP Conference Proceedings ; 595)

Call No. (NDL)
M17-03-4591
Bibliographic ID of National Diet Library
000004240174
Material type
図書
Author
Mau, T. K. (Tak Kuen) , 1950-ほか
Publisher
American Institute of Physics
Publication date
c2001.
Material Format
Paper
Capacity, size, etc.
xvi, 544 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0735400385
ISSN (series)
0094-243X
Title
Radio frequency power in plasmas : 14th topical conference : Oxnard, California 7-9 May 2001. : May 2001, Oxnard, CA.
Series Title
AIP Conference Proceedings ; 595
Title Heading
American Institute of Physics. Conference proceedings ; no. 595.
Author Heading
Mau, T. K. (Tak Kuen) , 1950-
DeGrassie, John.
Topical Conference on Radio Frequency Power in Plasmas (14th : 2001 : Oxnard, Calif.)
Publication, Distribution, etc.
Melville : American Institute of Physics
Publication Date
c2001.
Publication Date (W3CDTF)
2001