MOEMS and miniaturized systems 2 : 22-24 October, 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA.

• Material Type: 図書
• ISBN: 0819442895 (pbk.)
• ISSN (series): 0277-786X
• Title: MOEMS and miniaturized systems 2 : 22-24 October, 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA.
• Series Title: SPIE Proceedings ; 4561
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4561.
• Author Heading: Semiconductor Equipment and Materials International (SEMI); Motamedi, M. Edward.; Göring, Rolf.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2001.
• Publication Date (W3CDTF): 2001
• Extent: xxv, 350 p. : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microelectromechanical systems -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optical scanners -- Congresses.
• LCC: TK7874
• DDC: 621.381
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographic references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-03-4564
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004240492; http://id.ndl.go.jp/bib/000004240492
• LC Control Number: 2002277677; https://lccn.loc.gov/2002277677
• RLIN No.: DCLC2002277677-B
• Bibliographic Record Category (NDL): 215