2001 6th international symposium on plasma- and process-induced damage : May 13-15, 2001 : Monterey, California, USA. : 2001 P2ID conference : May 2001, Monterey, CA.

• Material Type: 図書
• ISBN: 096515775X (softbound); 0965157768 (CD-ROM)
• Title: 2001 6th international symposium on plasma- and process-induced damage : May 13-15, 2001 : Monterey, California, USA. : 2001 P2ID conference : May 2001, Monterey, CA.
• Author Heading: Engelhardt, Manfred.; Hook, Terence.; Gabriel, Calvin T.; International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey, California)
• Publication, Distribution, etc.: Santa Clara : Northern California Chapter of the American Vacuum Society
• Publication Date: c2001.
• Publication Date (W3CDTF): 2001
• Extent: i, 128 p. : ill. ; 28 cm.
• Alternative Title: P2ID : international symposium on plasma- & process-induced damage
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor wafers -- Congresses.; Semiconductors -- Effect of radiation on -- Congresses.; Plasma radiation -- Congresses.
• NDLC: M17
• Note (General): Papers.; IEEE cat no 01TH8538 (softbound) , 01TH8538C (CD-ROM) .
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-03-4858
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004247217; http://id.ndl.go.jp/bib/000004247217
• RLIN No.: NYCGATK4888-B
• Bibliographic Record Category (NDL): 215