図書

Surface scattering and diffraction for advanced metrology : 1 August 2001 : San Diego, USA. : Aug 2001, San Diego, CA. (SPIE Proceedings ; 4447)

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Surface scattering and diffraction for advanced metrology : 1 August 2001 : San Diego, USA. : Aug 2001, San Diego, CA.

(SPIE Proceedings ; 4447)

Call No. (NDL)
M17-03-4990
Bibliographic ID of National Diet Library
000004247714
Material type
図書
Author
Gu, Zu-Han.ほか
Publisher
SPIE
Publication date
c2001.
Material Format
Paper
Capacity, size, etc.
vii, 164 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0819441619
ISSN (series)
0277-786X
Publication, Distribution, etc.
Publication Date
c2001.
Publication Date (W3CDTF)
2001