ULSI process integration 2 : proceedings of the international symposium. : 2nd international symposium on ULSI process integration : 199th meeting of the Electrochemical Society : Mar 2001, Washington, D.C. (PV ; 2001-2)

ULSI process integration 2 : proceedings of the international symposium. : 2nd international symposium on ULSI process integration : 199th meeting of the Electrochemical Society : Mar 2001, Washington, D.C.

(PV ; 2001-2)

Call No. (NDL): M17-03-4986
Bibliographic ID of National Diet Library: 000004248283

Material type: 図書

Author: Electrochemical Society.ほか

Publisher: Electrochemical Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: xiii, 614 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Papers."... contains papers that were presented at the second international symposium on ULSI Process Integration, held in Washington D.C. on March 24...

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Paper

Material Type: 図書
ISBN: 1566773083
Title: ULSI process integration 2 : proceedings of the international symposium. : 2nd international symposium on ULSI process integration : 199th meeting of the Electrochemical Society : Mar 2001, Washington, D.C.
Series Title: PV ; 2001-2
Title Heading: Proceedings (Electrochemical Society) ; v. 2001-2.
Author Heading: Electrochemical Society.
Claeys, Cor L.
Electrochemical Society. Meeting (199th : 2001 : Washington, D.C.)
International Symposium on ULSI Process Integration (2nd : 2001 : Washington, D.C.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: xiii, 614 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Ultra large scale integration -- Congresses.
LCC: TK7874.76
NDLC: M17
Note (General): Papers.
"... contains papers that were presented at the second international symposium on ULSI Process Integration, held in Washington D.C. on March 24-31, 2001 as part of the 199th Meeting of the Electrochemical Society "-- pref.
"Electronics Division" -- t. p.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-4986
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004248283
http://id.ndl.go.jp/bib/000004248283
LC Control Number: 00112102
https://lccn.loc.gov/00112102
RLIN No.: CUBGGLAD184905620-B
Bibliographic Record Category (NDL): 215