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博士論文

Design of a plasma sputter film deposition system and its application for GaN syntheses

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Design of a plasma sputter film deposition system and its application for GaN syntheses

Call No. (NDL)
UT51-2003-T111
Bibliographic ID of National Diet Library
000004282086
Material type
博士論文
Author
Randolph Estal Flauta [著]
Publisher
[Randolph Estal Flauta]
Publication date
2003
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
同志社大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Randolph Estal Flauta [著]
Author Heading
Randolph Estal Flauta ランドルフ エスタル フラウタ
Publication, Distribution, etc.
Publication Date
2003
Publication Date (W3CDTF)
2003
Extent
1冊
Alternative Title
プラズマスパッタ薄膜堆積装置の設計とGaN合成への応用 プラズマ スパッタ ハクマク タイセキ ソウチ ノ セッケイ ト GaN ゴウセイ エノ オウヨウ
Degree grantor/type
同志社大学