CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium D, "CMOS front-end materials and process technology" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 765)

CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium D, "CMOS front-end materials and process technology" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 765)

Call No. (NDL): M17-04-1224
Bibliographic ID of National Diet Library: 000004298957

Material type: 図書

Author: King, Tsu-Jae.ほか

Publisher: Materials Research Society

Publication date: c2003.

Material Format: Paper

Capacity, size, etc.: xi, 308 p. : ill. ; 24 cm.

NDC: -

Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 1558997024
Title: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium D, "CMOS front-end materials and process technology" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 765
Title Heading: Materials Research Society symposia proceedings. v. 765.
Author Heading: King, Tsu-Jae.
Materials Research Society. Meeting (2003 : San Francisco, California)
Symposium on CMOS Front-End Materials and Process Technology (2003 : San Francisco, California)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xi, 308 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Metal oxide semiconductors -- Materials -- Congresses.
Metal oxide semiconductors, Complementary -- Materials -- Congresses.
Nanostructure materials. -- Congresses.
Gate array circuits -- Materials -- Congresses.
Dielectrics -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and indexes.
Holding library: 国立国会図書館
Call No.: M17-04-1224
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004298957
http://id.ndl.go.jp/bib/000004298957
RLIN No.: MOHG53233488-B
Bibliographic Record Category (NDL): 215