Proceedings of ISSM2000 : the ninth international symposium on semiconductor manufacturing : September 26-28, 2000 : Hotel East 21 Tokyo : Tokyo, Japan.

• Material Type: 図書
• ISBN: 0780364066 (microfiche); 0780373928; 0780364058 (casebound)
• ISSN: 1523-553X
• Title: Proceedings of ISSM2000 : the ninth international symposium on semiconductor manufacturing : September 26-28, 2000 : Hotel East 21 Tokyo : Tokyo, Japan.
• Author Heading: International Symposium on Semiconductor Manufacturing (9th : 2000 : Tokyo, Japan)
• Publication, Distribution, etc.: Tokyo : Ultra Clean Society
• Publication Date: c2000.
• Publication Date (W3CDTF): 2000
• Extent: 6 microfiches (465 fr.) ; 11 x 15 cm.
• Alternative Title: Proceedings of ISSM2000 : the 9th international symposium on semiconductor manufacturing : September 26-28, 2000 : Hotel East 21 Tokyo : Tokyo, Japan; 2000 9th international symposium on semiconductor manufacturing
• Place of Publication (Country Code): JP
• Text Language Code: eng
• Note (Text Language): English with some material in Japanese.
• Note (Material Type): [microform].
• Subject Heading: Electronic industries -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Computer integrated manufacturing systems -- Congresses.
• LCC: TK7871.85
• NDLC: M17
• Note (General): Papers.; IEEE cat no 00CM37130 (microfiche) , 00CH37130.
• Note (Bibliography): Includes bibliographical references.
• Holding library: 国立国会図書館
• Call No.: M17-LS-08-2
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004316096; http://id.ndl.go.jp/bib/000004316096
• RLIN No.: NJRGA1698720-B
• Bibliographic Record Category (NDL): 215