Materials, technology and reliability for advanced interconnects and low-k dielectrics -- 2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. : symposium E, "materials, technology and reliability for advanced interconnects and low-k dielectrics" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 766)

Materials, technology and reliability for advanced interconnects and low-k dielectrics -- 2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. : symposium E, "materials, technology and reliability for advanced interconnects and low-k dielectrics" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 766)

Call No. (NDL): M17-04-1652
Bibliographic ID of National Diet Library: 000004325711

Material type: 図書

Author: McKerrow, Andrew J.ほか

Publisher: Materials Research Society

Publication date: c2003.

Material Format: Paper

Capacity, size, etc.: xv, 515 p. : ill. ; 24 cm.

NDC: -

Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 1558997032
Title: Materials, technology and reliability for advanced interconnects and low-k dielectrics -- 2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. : symposium E, "materials, technology and reliability for advanced interconnects and low-k dielectrics" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 766
Title Heading: Materials Research Society symposia proceedings. v. 766.
Author Heading: McKerrow, Andrew J.
Materials Research Society. Meeting (2003 : San Francisco, California)
Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics (2003 : San Francisco, California)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xv, 515 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Materials. -- Congresses.
Semiconductors -- Junctions -- Congresses.
Dielectric films. -- Congresses.
Integrated circuits -- Materials. -- Congresses.
Integrated circuits -- Reliability. -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and indexes.
Holding library: 国立国会図書館
Call No.: M17-04-1652
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004325711
http://id.ndl.go.jp/bib/000004325711
RLIN No.: MOHG53783095-B
Bibliographic Record Category (NDL): 215