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博士論文

Syntheses of hard carbon-based thin films by plasma processing and their nanomechanical characteristics

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Syntheses of hard carbon-based thin films by plasma processing and their nanomechanical characteristics

Call No. (NDL)
UT51-2004-B396
Bibliographic ID of National Diet Library
000004358137
Material type
博士論文
Author
Kyung-Hwang Lee [著]
Publisher
[Kyung-Hwang Lee]
Publication date
[2003]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
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Paper

Material Type
博士論文
Author/Editor
Kyung-Hwang Lee [著]
Author Heading
李, 庚晃 イー, キョンハン
Publication, Distribution, etc.
Publication Date
[2003]
Publication Date (W3CDTF)
2003
Extent
1冊
Alternative Title
プラズマプロセスを用いた硬質炭素膜の作製とナノメカニカル特性評価 プラズマ プロセス オ モチイタ コウシツ タンソマク ノ サクセイ ト ナノメカニカル トクセイ ヒョウカ
Degree grantor/type
名古屋大学