Adhesion, Friction, and Wear of Plasma-Deposited Thin Silicon Nitride Films at Temperatures to 700 Deg C NASA-TM-101377 N89-11913 NAS-115101377 E-4431

Adhesion, Friction, and Wear of Plasma-Deposited Thin Silicon Nitride Films at Temperatures to 700 Deg C

NASA-TM-101377 N89-11913 NAS-115101377 E-4431

Call No. (NDL): LS-N89/11913
Bibliographic ID of National Diet Library: 000004971519

Material type: 規格・テクニカルリポート類

Author: Miyoshi, Kほか

Publisher: -

Publication date: -

Material Format: Microform

Capacity, size, etc.: microfiche 12 p

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Material Type: 規格・テクニカルリポート類
Title: Adhesion, Friction, and Wear of Plasma-Deposited Thin Silicon Nitride Films at Temperatures to 700 Deg C
Author/Editor: Miyoshi, K
Pouch, J. J
Alterovitz, S. A
Pantic, D. M
Johnson, G. A
Extent: microfiche 12 p
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : NASA-TM-101377
テクニカルリポート番号 : N89-11913
テクニカルリポート番号 : NAS-115101377
テクニカルリポート番号 : E-4431
Holding library: 国立国会図書館
Call No.: LS-N89/11913
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004971519
http://id.ndl.go.jp/bib/000004971519
Bibliographic Record Category (NDL): 291