Optical fiber coupled sensors integrating optical waveguides and micromechanical structures on silicon SAE-941205

Optical fiber coupled sensors integrating optical waveguides and micromechanical structures on silicon

SAE-941205

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Material Type: 規格・テクニカルリポート類
Title: Optical fiber coupled sensors integrating optical waveguides and micromechanical structures on silicon
Author/Editor: Boyd, Joseph T
De Brabander, Gregory N
Burcham, Kevin
Beheim, Glenn
Extent: 6 p
Alternative Title: Aerospace Atlantic conference and exposition. Dayton, Ohio. Apr. 1994
Report No.: テクニカルリポート番号 : SAE-941205
Holding library: 国立国会図書館
Call No.: M-SAE-941205
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005201334
http://id.ndl.go.jp/bib/000005201334
Bibliographic Record Category (NDL): 291