Surface micromachined angular rate sensor SAE-950538

Surface micromachined angular rate sensor

SAE-950538

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Material Type: 規格・テクニカルリポート類
Title: Surface micromachined angular rate sensor
Author/Editor: Johnson, Jack D
Zarabadi, Seyed R
Sparks, Douglas R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p
Alternative Title: International congress and exposition. Detroit, Mich. Feb.-Mar. 1995
Report No.: テクニカルリポート番号 : SAE-950538
Holding library: 国立国会図書館
Call No.: M-SAE-950538
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005482120
http://id.ndl.go.jp/bib/000005482120
Bibliographic Record Category (NDL): 291