Filtered cathodic arc source. Patent Application PATENTS-US-A7921780 DE94 016128 PAT-APPL-7-921780

Filtered cathodic arc source. Patent Application

PATENTS-US-A7921780 DE94 016128 PAT-APPL-7-921780

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Material Type: 規格・テクニカルリポート類
Title: Filtered cathodic arc source. Patent Application
Author/Editor: Falabella, S
Sanders, D. M
Publication Date: 1992
Publication Date (W3CDTF): 1992
Extent: 17 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : PATENTS-US-A7921780
テクニカルリポート番号 : DE94 016128
テクニカルリポート番号 : PAT-APPL-7-921780
Holding library: 国立国会図書館
Call No.: LS-DE94/016128
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005499308
http://id.ndl.go.jp/bib/000005499308
Bibliographic Record Category (NDL): 291