Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates SAND-94-8620C DE94 016779 CONF-9404404

Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates

SAND-94-8620C DE94 016779 CONF-9404404

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Material Type: 規格・テクニカルリポート類
Title: Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates
Author/Editor: Cardinale, G. F
Howitt, D. G
Mirkarimi, P. B
McCarty, K. F
Klaus, E. J
Publication Date: [1994]
Publication Date (W3CDTF): 1994
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-8620C
テクニカルリポート番号 : DE94 016779
テクニカルリポート番号 : CONF-9404404
Holding library: 国立国会図書館
Call No.: LS-DE94/016779
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005500186
http://id.ndl.go.jp/bib/000005500186
Bibliographic Record Category (NDL): 291