Gettering in multicrystalline silicon: A design-of-experiments approach SAND-94-1528C DE94 014289 CONF-9412034

Gettering in multicrystalline silicon: A design-of-experiments approach

SAND-94-1528C DE94 014289 CONF-9412034

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Material Type: 規格・テクニカルリポート類
Title: Gettering in multicrystalline silicon: A design-of-experiments approach
Author/Editor: Schubert, W. K
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 4 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-1528C
テクニカルリポート番号 : DE94 014289
テクニカルリポート番号 : CONF-9412034
Holding library: 国立国会図書館
Call No.: LS-DE94/014289
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005508056
http://id.ndl.go.jp/bib/000005508056
Bibliographic Record Category (NDL): 291