EUV metrology of multilayer optics SAND-95-8422C DE95 003036 CONF-94091775

EUV metrology of multilayer optics

SAND-95-8422C DE95 003036 CONF-94091775

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Material Type: 規格・テクニカルリポート類
Title: EUV metrology of multilayer optics
Author/Editor: Ray-Chaudhuri, A. K
Stulen, R. H
Ng, W
Cerrina, F
Spector, S
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-8422C
テクニカルリポート番号 : DE95 003036
テクニカルリポート番号 : CONF-94091775
Holding library: 国立国会図書館
Call No.: LS-DE95/003036
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005510970
http://id.ndl.go.jp/bib/000005510970
Bibliographic Record Category (NDL): 291