Chemical vapor deposition in low pressure batch furnaces SAND-93-8685C DE95 003035 CONF-9408097

Chemical vapor deposition in low pressure batch furnaces

SAND-93-8685C DE95 003035 CONF-9408097

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Material Type: 規格・テクニカルリポート類
Title: Chemical vapor deposition in low pressure batch furnaces
Author/Editor: Houf, W. G
Grcar, J. F
Publication Date: 1993
Publication Date (W3CDTF): 1993
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-93-8685C
テクニカルリポート番号 : DE95 003035
テクニカルリポート番号 : CONF-9408097
Holding library: 国立国会図書館
Call No.: LS-DE95/003035
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005510971
http://id.ndl.go.jp/bib/000005510971
Bibliographic Record Category (NDL): 291