Measurement and analysis of scatter from silicon wafers BNL-60899 DE95 002411 CONF-94072331

Measurement and analysis of scatter from silicon wafers

BNL-60899 DE95 002411 CONF-94072331

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Material Type: 規格・テクニカルリポート類
Title: Measurement and analysis of scatter from silicon wafers
Author/Editor: Stover, J. C
Bernt, M. L
Church, E. L
Takacs, P. Z
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : BNL-60899
テクニカルリポート番号 : DE95 002411
テクニカルリポート番号 : CONF-94072331
Holding library: 国立国会図書館
Call No.: LS-DE95/002411
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005511929
http://id.ndl.go.jp/bib/000005511929
Bibliographic Record Category (NDL): 291