Final technical report for (open quotes)application of IRIS to semiconductor plasma processing(close quotes) (CRADA No. 1031) SAND-94-2439 DE95 003591

Final technical report for (open quotes)application of IRIS to semiconductor plasma processing(close quotes) (CRADA No. 1031)

SAND-94-2439 DE95 003591

Call No. (NDL): LS-DE95/003591
Bibliographic ID of National Diet Library: 000005511990

Material type: 規格・テクニカルリポート類

Author: Ho, Pほか

Publisher: -

Publication date: 1994

Material Format: Microform

Capacity, size, etc.: 27 p. (1 microfiche)

NDC: -

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Material Type: 規格・テクニカルリポート類
Title: Final technical report for (open quotes)application of IRIS to semiconductor plasma processing(close quotes) (CRADA No. 1031)
Author/Editor: Ho, P
Killeen, K. P
Melius, C. F
Buss, R. J
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 27 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2439
テクニカルリポート番号 : DE95 003591
Holding library: 国立国会図書館
Call No.: LS-DE95/003591
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005511990
http://id.ndl.go.jp/bib/000005511990
Bibliographic Record Category (NDL): 291