Atomic force microscopy as a process characterization tool for GaAs-based integrated circuit fabrication SAND-94-2426C DE95 006223 CONF-9501172

Atomic force microscopy as a process characterization tool for GaAs-based integrated circuit fabrication

SAND-94-2426C DE95 006223 CONF-9501172

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Material Type: 規格・テクニカルリポート類
Title: Atomic force microscopy as a process characterization tool for GaAs-based integrated circuit fabrication
Author/Editor: Howard, A. J
Baca, A. G
Shul, R. J
Zolper, J. C
Sherwin, M. E
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 5 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2426C
テクニカルリポート番号 : DE95 006223
テクニカルリポート番号 : CONF-9501172
Holding library: 国立国会図書館
Call No.: LS-DE95/006223
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005512704
http://id.ndl.go.jp/bib/000005512704
Bibliographic Record Category (NDL): 291