Debris free, electron beam driven, lithography source at 130 (angstrom) LA-UR-94-3785 DE95 003687 CONF-94091776

Debris free, electron beam driven, lithography source at 130 (angstrom)

LA-UR-94-3785 DE95 003687 CONF-94091776

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Material Type: 規格・テクニカルリポート類
Title: Debris free, electron beam driven, lithography source at 130 (angstrom)
Author/Editor: Fulton, R. D
Abdallah, J
Goldstein, J. C
Jones, M. E
Kilcrease, D. P
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LA-UR-94-3785
テクニカルリポート番号 : DE95 003687
テクニカルリポート番号 : CONF-94091776
Holding library: 国立国会図書館
Call No.: LS-DE95/003687
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005513307
http://id.ndl.go.jp/bib/000005513307
Bibliographic Record Category (NDL): 291