Micromachined sensor and actuator research at the Microelectronics Development Laboratory SAND-94-2193C DE95 008540 CONF-9502284

Micromachined sensor and actuator research at the Microelectronics Development Laboratory

SAND-94-2193C DE95 008540 CONF-9502284

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Material Type: 規格・テクニカルリポート類
Title: Micromachined sensor and actuator research at the Microelectronics Development Laboratory
Author/Editor: Smith, J. H
Barron, C. C
Fleming, J. G
Montague, S
Rodriguez, J. L
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2193C
テクニカルリポート番号 : DE95 008540
テクニカルリポート番号 : CONF-9502284
Holding library: 国立国会図書館
Call No.: LS-DE95/008540
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005516284
http://id.ndl.go.jp/bib/000005516284
Bibliographic Record Category (NDL): 291