Passive damping to enhance active positioning of a prototype lithography platen SAND-94-2407C DE95 008539 CONF-9502283

Passive damping to enhance active positioning of a prototype lithography platen

SAND-94-2407C DE95 008539 CONF-9502283

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Material Type: 規格・テクニカルリポート類
Title: Passive damping to enhance active positioning of a prototype lithography platen
Author/Editor: Segalman, D. J
Kipp, R. L
Gregory, D. L
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2407C
テクニカルリポート番号 : DE95 008539
テクニカルリポート番号 : CONF-9502283
Holding library: 国立国会図書館
Call No.: LS-DE95/008539
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005516414
http://id.ndl.go.jp/bib/000005516414
Bibliographic Record Category (NDL): 291