Cavity formation and impurity gettering in He-implanted Si SAND-94-2049C DE95 007744 CONF-9502013

Cavity formation and impurity gettering in He-implanted Si

SAND-94-2049C DE95 007744 CONF-9502013

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Material Type: 規格・テクニカルリポート類
Title: Cavity formation and impurity gettering in He-implanted Si
Author/Editor: Follstaedt, D. M
Myers, S. M
Petersen, G. A
Medernach, J. W
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 36 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2049C
テクニカルリポート番号 : DE95 007744
テクニカルリポート番号 : CONF-9502013
Holding library: 国立国会図書館
Call No.: LS-DE95/007744
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005518094
http://id.ndl.go.jp/bib/000005518094
Bibliographic Record Category (NDL): 291