Defect centers in chemical-mechanical polished MOS oxides SAND-94-2619C DE95 004777 CONF-95061051

Defect centers in chemical-mechanical polished MOS oxides

SAND-94-2619C DE95 004777 CONF-95061051

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Material Type: 規格・テクニカルリポート類
Title: Defect centers in chemical-mechanical polished MOS oxides
Author/Editor: Shaneyfelt, M. R
Warren, W. L
Hetherington, D. L
Timon, R. P
Resnick, P. J
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 5 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-2619C
テクニカルリポート番号 : DE95 004777
テクニカルリポート番号 : CONF-95061051
Holding library: 国立国会図書館
Call No.: LS-DE95/004777
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005518585
http://id.ndl.go.jp/bib/000005518585
Bibliographic Record Category (NDL): 291