Substrate heating measurements in pulsed ion beam film deposition LA-UR-95-1281 DE95 010862 CONF-9504124

Substrate heating measurements in pulsed ion beam film deposition

LA-UR-95-1281 DE95 010862 CONF-9504124

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Material Type: 規格・テクニカルリポート類
Title: Substrate heating measurements in pulsed ion beam film deposition
Author/Editor: Olson, J. C
Davis, H. A
Rej, D. J
Waganaar, W. J
Tallant, D. R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LA-UR-95-1281
テクニカルリポート番号 : DE95 010862
テクニカルリポート番号 : CONF-9504124
Holding library: 国立国会図書館
Call No.: LS-DE95/010862
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005520647
http://id.ndl.go.jp/bib/000005520647
Bibliographic Record Category (NDL): 291