In situ surface roughness measurement during PECVD diamond film growth ANL/CHM/CP-85037 DE95 013411 CONF-95051922

In situ surface roughness measurement during PECVD diamond film growth

ANL/CHM/CP-85037 DE95 013411 CONF-95051922

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Material Type: 規格・テクニカルリポート類
Title: In situ surface roughness measurement during PECVD diamond film growth
Author/Editor: Zuiker, C. D
Gruen, D. M
Krauss, A. R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : ANL/CHM/CP-85037
テクニカルリポート番号 : DE95 013411
テクニカルリポート番号 : CONF-95051922
Holding library: 国立国会図書館
Call No.: LS-DE95/013411
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005521466
http://id.ndl.go.jp/bib/000005521466
Bibliographic Record Category (NDL): 291